Evaluation of the component composition and thickness of the modified layer of tungsten and tantalum carbides during stationary sputtering by helium ions bombardment
- Авторлар: Manukhin V.V.1
-
Мекемелер:
- National Research University “MPEI”
- Шығарылым: № 9 (2024)
- Беттер: 101-105
- Бөлім: Articles
- URL: https://kazanmedjournal.ru/1028-0960/article/view/664754
- DOI: https://doi.org/10.31857/S1028096024090133
- EDN: https://elibrary.ru/EHOQAG
- ID: 664754
Дәйексөз келтіру
Аннотация
A method is proposed for calculating the component composition and thickness of a layer of two-component targets changed as a result of prolonged (stoichiometric) sputtering when irradiated with light ions. The method is based on a previously tested model of sputtering inhomogeneous two-component materials with light ions. In the case of stationary sputtering of tungsten and tantalum carbides with helium ions, the results of calculations of the component composition and thickness of the modified layer are presented in comparison with experimental data.
Толық мәтін

Авторлар туралы
V. Manukhin
National Research University “MPEI”
Хат алмасуға жауапты Автор.
Email: manukhinvv@mpei.ru
Ресей, Moscow, 111250
Әдебиет тізімі
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