Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma

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The influence of the addition of hydrogen on the electrophysical parameters and emission spectra of tetrafluoromethane under conditions of a direct current glow discharge has been studied. It has been established that gas temperature changes nonlinearly with increasing proportion of hydrogen in the plasma-forming mixture. The emission spectra of tetrafluoromethane plasma with hydrogen were obtained and analyzed. It is shown that plasma radiation is represented by atomic and molecular components, and the dependences of the line radiation intensities on the external conditions of the discharge are determined by the excitation of emitting states during direct electron impacts.

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D. Murin

Federal State Budgetary Educational Institution of Higher Education “Ivanovo State Chemical-Technological University”

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Email: dim86@mail.ru
俄罗斯联邦, Ivanovo

A. Grazhdyan

Federal State Budgetary Educational Institution of Higher Education “Ivanovo State Chemical-Technological University”

Email: dim86@mail.ru
俄罗斯联邦, Ivanovo

I. Chesnokov

Federal State Budgetary Educational Institution of Higher Education “Ivanovo State Chemical-Technological University”

Email: dim86@mail.ru
俄罗斯联邦, Ivanovo

I. Gogulev

Federal State Budgetary Educational Institution of Higher Education “Ivanovo State Chemical-Technological University”

Email: dim86@mail.ru
俄罗斯联邦, Ivanovo

参考

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2. Fig. 1. Dependences of the specific power invested in the discharge on the proportion of hydrogen in the CF4/H2 mixture.

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3. Fig. 2. The dependence of the gas temperature on the proportion of hydrogen in the CF4/H2 mixture.

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4. Fig. 3. Dependences of the parameter of the reduced electric field strength E / N on the proportion of hydrogen in a mixture with CF4/H2 for i = 15 and 25 mA.

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5. Fig. 4. Overview spectrum of CF4/H2 plasma radiation (p = 100 Pa, i = 25 mA).

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6. Fig. 5. Dependence of the radiation intensity of atoms F (a) and H (b) on the proportion of H2 in the CF4/H2 mixture, i = 25 mA.

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7. Fig. 6. Dependence of the radiation intensity of molecules on the proportion of H2 in the CF4/H2 mixture, i = 25 mA.

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